Nicolae, Lobontiu <br/><br/>
Mechanics of Microelectromechanical Systems/ 
Lobontiu Nicolae Et.al 
 -  Springer Nature (Sie), 
<br/><br/><label>ISBN: </label>9788181288493 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Engineering
<br/><br/><label>Dewey Class. No.: </label>621.381  / LOB