Sparks, Barkley <br/><br/>
Microelectromechanical Systems: Concepts, Design and Analysis / 
Barkley Sparks 
 - 1st edition 
 -  Larsen and Keller Education ,  2022 
 - 253 pages 
<br/><br/><label>ISBN: </label>9781641720052 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Engineering
<br/><br/><label>Dewey Class. No.: </label>621.381  / SPA