Elwenspoek, M. <br/><br/>
Mechanical Microsensors, / 
M. Elwenspoek 
 - 1st edition 
 -  Springer ,  2001 
<br/><br/><label>ISBN: </label>9783642087066 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Materials Science
<br/><br/><label>Dewey Class. No.: </label>621.381  / ELW