Hartzell, Allyson L. <br/><br/>
Mems Reliability, / 
Allyson L. Hartzell 
 - 1st edition 
 -  Springer ,  2011 
<br/><br/><label>ISBN: </label>9781441960177 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Engineering
<br/><br/><label>Dewey Class. No.: </label>621.381  / HAR