Maluf, Nadim <br/><br/>
An Introduction to Micro Electro Mechanical Systems Engineering / 
Nadim Maluf and Kirt Williams 
 - 2nd edition 
 -  Artech House ,  2004 
<br/><br/><label>ISBN: </label>9781580535908 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Engineering
<br/><br/><label>Dewey Class. No.: </label>621.381  / MAL