Lyshevski <br/><br/>
Mems And Nems: Systems, Devices, And Structures 
Lyshevski 
 - 1 st edition 
 -  Crc Press  Rpt. 2010 
<br/><br/><label>ISBN: </label>9780849312625 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Physics
<br/><br/><label>Dewey Class. No.: </label>621.381  / LYS