000 00383nam a2200145Ia 4500
008 230706s9999 xx 000 0 und d
020 _a9789354601224
082 _a621.381
_bKIM
100 _aKim
245 0 _aFundamentals Of Microelectromechanical Systems (Mems)
_cKim
250 _a0
260 _bMcgraw Hill
_c2020-10-08
650 _aElectronic Communication
942 _cENG
999 _c128871
_d128871