000 00360nam a2200145Ia 4500
008 230724s9999 xx 000 0 und d
020 _a9781558999800
_qhbk
082 _a620.5
_bDAR
100 _aDaryush
245 0 _aIon Based Nanofabrication /
_cDaryush
250 _a1st edition
260 _bCambridge ,
_c2007
300 _a256
650 _aEngineering
999 _c167822
_d167822