| 000 | 00454nam a2200157Ia 4500 | ||
|---|---|---|---|
| 008 | 230702s9999 xx 000 0 und d | ||
| 020 |
_a9781641720052 _bpbk |
||
| 082 |
_a621.381 _bSPA |
||
| 100 | _aSparks, Barkley | ||
| 245 | 0 |
_aMicroelectromechanical Systems: Concepts, Design and Analysis / _cBarkley Sparks |
|
| 250 | _a1st edition | ||
| 260 |
_bLarsen and Keller Education , _c2022 |
||
| 300 | _a253 pages | ||
| 650 | _aEngineering | ||
| 942 | _cENG | ||
| 999 |
_c54166 _d54166 |
||