000 00331nam a2200133Ia 4500
008 230702s9999 xx 000 0 und d
020 _a9781119161349
082 _a621.3815422
_bSOU
100 _aSouk
245 0 _aFlat Panel Display Manufacturing /
_cSouk
260 _bJohn Wiley ,
_c2021
650 _aMechanical
942 _cENG
999 _c81173
_d81173